In thermal insulation coating, thermal interface, and metal/semiconductor nanotechnology in major national special major core electronic device high-end general-purpose chips and basic software products, very large scale integrated circuit manufacturing technology and complete sets of processes, large-scale aircraft, gas turbine (aero-engine) and other projects Films, porous media, and other materials with micro/nano structures are critical, and accurate measurement of their thermal properties plays a key role in the completion of the project. The Heat and Mass Transfer Center of the Institute of Engineering Thermophysics, Chinese Academy of Sciences has developed a dual-wavelength femtosecond laser pump-detection heat reflection measurement system with internationally advanced level and independent intellectual property rights. Utilizing the ultra-high heat flux density and ultra-short pulse characteristics of femtosecond lasers, it has a spatial resolution that cannot be achieved with conventional thermal properties measuring instruments, and can achieve precise thermal properties of materials such as thin films, interfaces, porous media, and powders on the nanometer scale. measuring.
Based on the dual-wavelength femtosecond laser pumping-detection heat reflection measurement system technology, based on the principle of modular design, it strictly implements repeated design verification, material verification, and process verification in the demonstration, engineering design, manufacturing, and application demonstration. To ensure reliability, safety, and functional specifications, the optical system, circuit control system, and data acquisition system are modularized and integrated, and an independent and industrially-producible core machine is formed, and a system operation and weak signal can be established. Extraction and data processing integrated control software.
For different application fields, the development of this instrument can focus on the following issues: large-scale integrated circuits, thin film materials for high-power laser thermal management, and difficulty in accurate measurement of interface heat transport characteristics; high-performance aero-engine turbines, combustion chambers, and aircraft high temperatures Thermal insulation performance of key components thermal protection coating materials, interfacial thermal resistance of coating-substrate, thermal conductivity of high thermal conductivity carbon/carbon composite materials are difficult to measure accurately; thermal properties and heat transfer performance of new high-efficiency nano energy-saving materials Difficulties with accurate standards. The development of the instrument serves the fields of microelectronics, optoelectronics, aerospace, and industrial energy conservation. It can break through the development bottleneck brought about by heat transfer problems, and at the same time promote the rapid development of the research and application of new functional materials in the aforementioned industrial fields.
The project was supported by the national special scientific equipment development project.
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